| Spec | Description |
|---|---|
| S1 | Next multi-sequence monitor |
| S2 | Control status input |
| S3 | Step trigger |
| S4 | Emergency stop (E-STOP) |
| S5 | Hold/resume |
| S6 | Manual/auto permissive |
| S7 | Auto trigger |
| S8 | Insert trigger |
| S9 | Resume phase number |
| S10 | Insert step number |
| S11 | Insert recipe number |
| S12 | Spare |
| S13 | Phase 1 step |
| S14 | Phase 2 step |
| S15 | Phase 3 step |
| S16 | Phase 4 step |
| S17 | Phase 5 step |
| S18 | Phase 6 step |
| S19 | Phase 7 step |
| S20 | Phase 8 step |
| S21 | Normal phase 1 |
| S22 | Normal phase 2 |
| S23 | Normal phase 3 |
| S24 | Normal phase 4 |
| S25 | Normal phase 5 |
| S26 | Normal phase 6 |
| S27 | Normal phase 7 |
| S28 | Normal phase 8 |
| S29 | Fault phase 1 |
| S30 | Fault phase 2 |
| S31 | Fault phase 3 |
| S32 | Fault phase 4 |
| S33 | Fault phase 5 |
| S34 | Fault phase 6 |
| S35 | Fault phase 7 |
| S36 | Fault phase 8 |
| S37 | Phase 1 recipe |
| S38 | Phase 2 recipe |
| S39 | Phase 3 recipe |
| S40 | Phase 4 recipe |
| S41 | Phase 5 recipe |
| S42 | Phase 6 recipe |
| S43 | Phase 7 recipe |
| S44 | Phase 8 recipe |
| Block | Type | Description |
|---|---|---|
| N | Real | Jump step number |
| N+1 | Bit | Jump step trigger |
| N+2 | Real | Recipe jump step |
| N+3 | Real | Current phase |
| N+4 | Bit | Insert step done |
| N+5 | Bit | Run/hold |
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